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Commentary: Japanese Companies Move Toward Commercializing Extreme Ultraviolet Resists

Jan. 20, 2017

Filed Under: Industry, Innovation Tagged With: EUV, extreme ultraviolet, JSR, resists, Tokyo Ohka Kogyo, Toyo Gosei

Japanese companies have kicked off efforts to commercialize resists for extreme ultraviolet (EUV) lithography, a technique that is expected to…...

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