Japanese companies have kicked off efforts to commercialize resists for extreme ultraviolet (EUV) lithography, a technique that is expected to…...
Japan's leading chemical industry newspaper
Filed Under: Industry, Innovation Tagged With: EUV, extreme ultraviolet, JSR, resists, Tokyo Ohka Kogyo, Toyo Gosei
Japanese companies have kicked off efforts to commercialize resists for extreme ultraviolet (EUV) lithography, a technique that is expected to…...